Microtronic, maker of superior macro defect inspection programs and software program, has introduced a handy and extremely exact option to monitor the weights of semiconductor wafers concurrently defects are being inspected – all on a single device. This patented functionality known as WaferWeight and it integrates absolutely into Microtronic’s EAGLEview™ line of high-speed macro defect inspection programs. It may be added to the most recent EAGLEview 6 and in addition to earlier fashions of the device.
Picture Credit score: Microtronic
“Wafer mass metrology has grow to be more and more essential as semiconductor processes have grow to be extra complicated and delicate,” stated Microtronic CEO Reiner Fenske in making the announcement. “In the present day’s fabs would really like to have the ability to measure the wafer mass modifications that happen throughout processing, particularly in deposition, etch, plating, backgrinding, bonding, TSV, and comparable steps. Nevertheless, earlier wafer weight measurement strategies have been sluggish and costly, requiring a separate device. Now, WaferWeight permits fabs to trace wafer mass shortly, precisely, and economically – concurrently with macro defect inspection. Our EAGLEview can do defect inspection and wafer weighing each on the identical time, on a single system.”
“And throughput pace performs a necessary function on this course of,” Fenske added. “With the intention to monitor modifications in wafer weight, fabs really want to acquire knowledge from each single wafer in each single lot. It’s the distinctive pace of the EAGLEview that makes this attainable. Which is why many top-tier fabs world wide have already chosen to include our WaferWeight functionality.”
The brand new WaferWeight measurements might have a decision as little as 0.1mg. This permits exact monitoring of modifications in wafer mass between course of steps – and in addition between completely different wafers in so much. Monitoring wafer weight at numerous factors all through processing could be invaluable for locating sure course of issues that can’t be detected visually. A wafer weight change that exceeds allowable ranges can instantly flag a difficulty that wants additional inspection or correction. Complete wafer weight data can be included in SPC programs to reinforce the precision and high quality of a fab’s course of monitoring total.
WaferWeight data can all be saved in EAGLEview’s highly effective ProcessGuard™ software program. This technique maintains a database of knowledge on each wafer run by way of the device – by lot, date and time. It will probably robotically randomize wafers and monitor incoming and outgoing slot positions of each wafer. ProcessGuard’s built-in Slot-Positional Evaluation Device can plot and examine a variety of wafer data, together with wafer weight. It will probably present wafer weights and pre/put up course of weight deltas for each slot place.
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